Thin films-preparation, structure and properties. Initial nucleation of photo-CVD amorphous silicon by photodecomposition of disilane.
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
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ژورنال
عنوان ژورنال: NIPPON KAGAKU KAISHI
سال: 1987
ISSN: 2185-0925,0369-4577
DOI: 10.1246/nikkashi.1987.1928